performance of IBM PCs encourage the development of software tools that
can be used for 2D/3D modeling of semiconductor devices and processes
on a PC. Rather severe limitations on memory and speed of computation
in previous generations of PCs forced development of new numerical techniques
which formed the basis of the new generation of simulation tools. Some
years ago a few efficient programs of this kind were developed which have
been integrated together into a package named MicroTec.
allows 2D silicon process modeling including implantation, diffusion,
epitaxy and oxidation and 2D steady-state semiconductor device simulation
including MOSFET, SOI-MOSFET, DMOS, JFET, BJT, IGBT, Schottky devices
etc. Although MicroTec is significantly simplified compared to widely
available commercial simulators, it nevertheless is a very powerful
modeling tool used for industrial semiconductor process/device design.
In many instances MicroTec outperforms existing commercial tools and
it is remarkably robust and easy-to-use.
is especially attractive for educational purposes due to its ease of
use and robustness. It enables to develop a set of problems for a tutorial
in semiconductor device physics with minimal effort. The goal of such
a computer-aided course would be to give students basic ideas about
the modern semiconductor device design in a realistic model environment.
apparent simplicity MicroTec covers basic needs for semiconductor process/device
design complemented with efficient and flexible graphics tools. It is
much easier to use than any other tool of its kind. MicroTec is a must
for those who want to understand physics of semiconductor devices without
knowing much about computers or numerical methods and who do not have
much time for learning new process/device simulation tools. MicroTec
is an excellent tool for managers, R&D engineers, students, professors
and researchers and can be referred to as a TCAD calculator.
is based on the diffusion-drift model and employs finite difference
technique on a rectangular, auto-adjusting mesh.
is a true 32-bit application for Windows 95, 98, NT and 2000, and can
be run on any PC-386 or higher. MicroTec-3.05 uses dynamic memory allocation.
There is no memory threshold so it can be used even on a computer with
only 1 Mbyte memory if the mesh size is not larger than about 2,000
commercially available tools require about 20 Mbyte memory for a mesh
size limited by 3,500 nodes. MicroTec-3.05 device simulation tools require
about 8 Mbytes of memory for a 20,000 node mesh. Typical CPU time for
one I-V point is less than 10 seconds on a Pentium PC when using 1,000
process simulation tool, about 4 Mbytes of memory is required for a
20,000 node mesh. Simulation of a typical technological route requires
about a minute CPU time on a Pentium PC.
limited capability version of MicroTec-3.05
Read a brief MicroTec Tutorial
in PDF format